兆竑科技有限公司

　Thermoball cell is a cell for deposition of organic materials which realized effective use of source material and the stability of a growth rate by having the heater structure excellent in temperature control of a low temperature region, and by using Thermoball for keeping the temperature distribution in crucible uniform. 　Generally, the organic materials has the characteristic of high vapor pressure, high sublimation nature and low thermal conductivity. Since depositing at low temperature is common for such a material, temperature control in a low temperature region becomes important. Moreover, since thermal conductivity is bad, the temperature gradient near the wall in crucible and near a deposition material center will become large. Therefore, if temperature is increased in order to enlarge a growth rate, the material near the wall in crucible will cause thermal deformation. Consequently, deposition material will become useless. 　The Thermoball cell has realized outstanding temperature control in a low temperature region of 600 degrees C or less and is suitable for use at a general organic material deposition temperature with optimization of heater structure. Furthermore, by mixing Thermoball to a source material, the low thermal conductivity of a source material is deformed, and the same character as high vapor pressure material comes to be shown. Because of this, the temperature gradient in source material was made small and the uniform temperature distribution is realized. It has succeeded in losing thermal deformation of the material by the heat spot which had become a problem by the conventional organic material deposition.