兆竑科技有限公司

Thermoball Valved Cell is the cell for organic material deposition which has the deposition rate stabilized extremely and quick rate changeability by the high precision valve which can control beam flux with Thermoball which mixed with material and filling into crucible. 　The feature of the high vapor pressure and high sublimation nature which are seen sometimes brings serious problem to organic material deposition. Since there are some such materials which are sublimated during baking (could be room temperature depending on material), the contamination to other materials and substrates will be caused. 　Thermoball Valved Cell consists of a material room, a valve control room and a flux injector, and each can be heated independently. Flux is controlled by the needle valve with the highly precise vapor generated by heating a material room. Since opening and closing of a valve can control flux, change of a quick growth rate is realizable. Since it is also possible to set flux to 0 by full closing a valve, preventing the contamination to other material, useless consumption of material can be held down. Furthermore, high stability of a growth rate is realized by mixing with material and being filled up with Thermoball. 　Moreover, large capacity of crucible preparation is easy and since it becomes possible to be filled up with many deposition material as compared with the conventional cell, reduction of the further cost is expectable.