・Thermoball TM is a kind of ceramic which is formed in unfixed form with   1～2 mm size. ・It shall be mixed with OLED materials having poor thermal conductivity as  sublimate in a crucible to uniform heating  temperature.

• Tungsten, tantalum or graphite heater
• Wafer temperatures up to 1200 °C
• Continuous substrate rotation and
      linear travel for substrate transfer
• Water cooled ceramic bearings for continuous rotation
• Clean operation and high reliability
• Substrate sizes up to 6 inch
• Optional: integrated main shutter

　The optimal cell can be chosen according to a use such as Low Temperature Cell for a low temperature and high vapor pressure material, a Standard Cell for a midium uapor pressure material, a High Temperature Cell for a high temperature and low vapor pressure material cell. 　Operation stabilization is realized by the optimal heater and curicble design for each material. Quick service by pure domestic production. The patented PWM power supply operates a dual heater.

　Thermoball cell is a cell for deposition of organic materials which realized effective use of source material and the stability of a growth rate by having the heater structure excellent in temperature control of a low temperature region, and by using Thermoball for keeping the temperature distribution in crucible uniform. 　Generally, the organic materials has the characteristic of high vapor pressure, high sublimation nature and low thermal conductivity. Since depositing at low temperature is common for such a material, temperature control in a low temperature region becomes important. Moreover, since thermal conductivity is bad, the temperature gradient near the wall in crucible and near a deposition material center will become large. Therefore, if temperature is increased in order to enlarge a growth rate, the material near the wall in crucible will cause thermal deformation. Consequently, deposition material will become useless. 　The Thermoball cell has realized outstanding temperature control in a low temperature region of 600 degrees C or less and is suitable for use at a general organic material deposition temperature with optimization of heater structure. Furthermore, by mixing Thermoball to a source material, the low thermal conductivity of a source material is deformed, and the same character as high vapor pressure material comes to be shown. Because of this, the temperature gradient in source material was made small and the uniform temperature distribution is realized. It has succeeded in losing thermal deformation of the material by the heat spot which had become a problem by the conventional organic material deposition.

Thermoball Valved Cell is the cell for organic material deposition which has the deposition rate stabilized extremely and quick rate changeability by the high precision valve which can control beam flux with Thermoball which mixed with material and filling into crucible. 　The feature of the high vapor pressure and high sublimation nature which are seen sometimes brings serious problem to organic material deposition. Since there are some such materials which are sublimated during baking (could be room temperature depending on material), the contamination to other materials and substrates will be caused. 　Thermoball Valved Cell consists of a material room, a valve control room and a flux injector, and each can be heated independently. Flux is controlled by the needle valve with the highly precise vapor generated by heating a material room. Since opening and closing of a valve can control flux, change of a quick growth rate is realizable. Since it is also possible to set flux to 0 by full closing a valve, preventing the contamination to other material, useless consumption of material can be held down. Furthermore, high stability of a growth rate is realized by mixing with material and being filled up with Thermoball. 　Moreover, large capacity of crucible preparation is easy and since it becomes possible to be filled up with many deposition material as compared with the conventional cell, reduction of the further cost is expectable.

• Monitor video from firewire (IEEE-1394) video cameras
• Take snapshots which pop up in resizable floating windows
• Automatically save images at user specified time intervals
• Record video files
• Load saved video for later analysis
• Define multiple regions of interest on video image (rectangles and lines)
• Monitor intensity vs. time of multiple regions simultaneously (color coded)
• Show real time histogram of entire image, or region of interest
• Show real time line scans
• Create 2D line scan images and show intensity vs time and intensity vs. distance with movable cursors
• RHEED oscillation tool automatically filters data, optimizes cursor positions at peak and calculates oscillations/sec

The high temperature material and low vapor pressure material with difficult vapor deposition by k-Cell are vapor deposited by the source of e-Gun vapor deposition. Broad lineup such as a type which can be easily added to MBE system and in which multi-vapor deposition is possible. Elimination of beam curl-Electrons impact the melt at a 90° angle providing maximum energy transfer with a minimum of energy-wasting secondary electrons. This is the result of a carefully graduated magnetic field which is stronger at the top of the crucible than at the bottom. Elimination of pole pieces-Vertically mounted magnets result in less magnetic flux leakage. This improves electron capture, and it improves efficiency. Thus, the more compact a magnetic circuit is, the smaller its source footprint. Easy filament alignment-Filaments are quickly, easily, and very accurately aligned by simply removing the emitter assembly from the vacuum system. An alignment tool is included with each gun. More efficient electron collimation-Our new design produces a better collimated beam with fewer stray electrons. Minimal filament distortion-By clamping the filament adjacent to the spiral, filament movement is held to a minimum. Electron tails-Special filament shielding prevents low energy electrons from leaving the filament environment, eliminating electron tails.

Hydrogen Atom Beam Source
Oxygen Atom Beam Source
Thermal Gas Injector
氫氧原子源