热解石墨PG
热解石墨PG(pyrolytic graphite)板材与热解石墨涂层产品:
密度:2.18~2.20g/cm3;
抗压强度:≥83.6 MPa ab向;
抗拉强度:≥75 MPa ab向;
纯度(杂质含量)≤0.005-0.001%;
热导率:400 W/M.K ab向,接近於铜材料;
2 W/M.K c向,相当於陶瓷材料;
热膨胀系数:3.2×10-6/℃ ab向
电阻率:2×10-4Ω。cm ab向
0.6Ω。cm c向
不透气性:氦透过率<10-10cm2
密度:2.18~2.20g/cm3;
抗压强度:≥83.6 MPa ab向;
抗拉强度:≥75 MPa ab向;
纯度(杂质含量)≤0.005-0.001%;
热导率:400 W/M.K ab向,接近於铜材料;
2 W/M.K c向,相当於陶瓷材料;
热膨胀系数:3.2×10-6/℃ ab向
电阻率:2×10-4Ω。cm ab向
0.6Ω。cm c向
不透气性:氦透过率<10-10cm2
Metal Carbide Coating on Graphite
Metal Carbide Coating on Graphite ,
For Improved Performance in GaN and SiC Thin Film Equipment,
TaC and NbC Coating,
Longer Life, Improved Reliability
Thermally stable to over 2000 deg.C
For Improved Performance in GaN and SiC Thin Film Equipment,
TaC and NbC Coating,
Longer Life, Improved Reliability
Thermally stable to over 2000 deg.C